Here we present a new sensing method for realizing large-range displacement measurement in narrow space sce-narios based on the combination of a fiber microprobe interference-sensing model and precision phase-generated carrier. The principal error of micro Fabry–Perot interferometric structure is avoided, and high-precision interferometric displacement. The interferometric measuring technology used in the FDM Series delivers nanometer accuracy and absolute distance values of almost any type of surface. Using fiber-integrated beam steering and shaping, individual sensors up to a diameter of 80 microns can be manufactured. This is achieved by microprobe tilted-axis Gaussian optical field.
